Publication:

DyScHfO as high-k gate dielectric: structural and electrical properties

Date

2007

Proceedings Paper

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Author(s)

Adelmann, Christoph

;

Van Elshocht, Sven

;

;

Conard, Thierry

;

Franquet, Alexis

;

;

Ragnarsson, Lars-Ake

;

Chang, Vincent S.

;

;

;

De Gendt, Stefan

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Acq. date: 2026-02-25