DyScHfO as high-k gate dielectric: structural and electrical properties

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Author(s)

Adelmann, Christoph

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Van Elshocht, Sven

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;

Conard, Thierry

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Franquet, Alexis

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Ragnarsson, Lars-Ake

;

Chang, Vincent S.

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;

;

De Gendt, Stefan

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1975 since deposited on 2021-10-16

Acq. date: 2025-10-23