Browsing by author "Uchida, J."

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Characterization of integrated optical CD for process control

Yu, J.; Uchida, J.; Van Dommelen, Y.; Carpaij, R.; Cheng, Shaunee; Pollentier, Ivan; Viswanathan, A.; Lane, L.; Barry, K.; Jakatdar, N. (2004)
In-line litho cluster monitoring and control using integrated scatterometry

Pollentier, Ivan; Cheng, Shaunee; Baudemprez, Bart; Laidler, David; van Dommelen, Y.; Carpaij, R.; Yu, J.; Uchida, J.; Viswanathan, A.; Chin, D.T.; Barry, K.; Jakatdar, N. (2004-02)