Browsing by author "Sengoku, Naohisa"
Now showing items 1-2 of 2
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Defect profiling and the role of nitrogen in lanthanum oxide-capped high-k dielectrics for nMOS applications
O'Sullivan, Barry; Mitsuhashi, Riichirou; Okawa, Hiroshi; Sengoku, Naohisa; Schram, Tom; Groeseneken, Guido; Biesemans, Serge; Nakabayashi, Takashi; Ikeda, Atsushi; Niwa, Masaaki (2008-09) -
Thermally-stable high effective work function TaCN thin films for metal gate electrode applications
Adelmann, Christoph; Meersschaut, Johan; Ragnarsson, Lars-Ake; Conard, Thierry; Franquet, Alexis; Sengoku, Naohisa; Okuno, Yasutoshi; Favia, Paola; Bender, Hugo; Zhao, Chao; OSullivan, barry; Rothschild, Aude; Schram, Tom; Kittl, Jorge; Van Elshocht, Sven; De Gendt, Stefan; Lehnen, Peer; Boissière, Olivier; Lohe, Christoph (2009)