Browsing by author "Melvin III, Lawrence"

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Stochastic printing behavior of non-local mask deficiencies in EUV lithography

Jonckheere, Rik; Melvin III, Lawrence (2020)
Two-dimensional feature stochastic printing with mask deficiencies in high-NA EUV

Melvin III, Lawrence; Jonckheere, Rik; Hendrickx, Eric (2021)