Publication:

Two-dimensional feature stochastic printing with mask deficiencies in high-NA EUV

Date

2021

Presentation

https://doi.org/10.1117/12.2584775

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Author(s)

Melvin III, Lawrence

;

Jonckheere, Rik

;

Hendrickx, Eric

Statistics

2013 since deposited on 2021-10-31

2last month

Acq. date: 2026-02-26