Browsing by author "Tonooka, Yoji"
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Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM
Yamana, Mitsuharu; Lamantia, Matthew; Philipsen, Vicky; Wada, Shingo; Nagatomo, Tatsuya; Tonooka, Yoji (2009) -
Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM
Yamana, Mitsuharu; Wada, Shingo; Nagatomo, Tatsuya; Tonooka, Yoji; Lamantia, Matthew; Philipsen, Vicky (2009)