Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM

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Authors
Yamana, Mitsuharu; Lamantia, Matthew; Philipsen, Vicky; Wada, Shingo; Nagatomo, Tatsuya; Tonooka, Yoji
Conference
Photomask and Next-Generation Lithography Mask Technology XVI
Title
Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM
Publication type
Proceedings paper
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