Browsing by author "Ulea, Neli"
Now showing items 1-4 of 4
-
Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring
Halder, Sandip; Mols, Yves; Van Den Heuvel, Dieter; Van Puymbroeck, Jan; Caymax, Matty; Vancoille, Eric; Nieuborg, Nancy; Bast, Gerhard; Simpson, Gavin; Peikert, Milko; Polli, Marco; Ulea, Neli; Seong, Ho Yoo (2014) -
Using the low frequency component of the background signal for SiGe and Ge growth monitoring
Halder, Sandip; Schulze, Andreas; Leray, Philippe; Caymax, Matty; Bast, Gerhard; Simpson, Gavin; Ulea, Neli; Polli, Marco (2015) -
Within-die and within-wafer CMP process characterization and monitoring using PWG Fizeau interferometry system
Teugels, Lieve; Devriendt, Katia; Heylen, Nancy; Tsvetanova, Diana; Struyf, Herbert; Bast, Gerhard; Ramkhalawon, Roshita; Mueller, Dieter; Simpson, Gavin; Ulea, Neli (2016) -
Within-die and within-wafer CMP process characterization and monitoring using PWG Fizeau interferometry system
Teugels, Lieve; Devriendt, Katia; Heylen, Nancy; Tsvetanova, Diana; Struyf, Herbert; Bast, Gerhard; Ramkhalawon, Roshita; Mueller, Dieter; Simpson, Gavin; Ulea, Neli (2016)