Authors

Halder, Sandip; Schulze, Andreas; Leray, Philippe; Caymax, Matty; Bast, Gerhard; Simpson, Gavin; Ulea, Neli; Polli, Marco

Conference

26th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC

Title

Using the low frequency component of the background signal for SiGe and Ge growth monitoring

Publication type

Proceedings paper

Embargo date

9999-12-31