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Using the low frequency component of the background signal for SiGe and Ge growth monitoring
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Using the low frequency component of the background signal for SiGe and Ge growth monitoring
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Date
2015
Proceedings Paper
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31391.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Halder, Sandip
;
Schulze, Andreas
;
Leray, Philippe
;
Caymax, Matty
;
Bast, Gerhard
;
Simpson, Gavin
;
Ulea, Neli
;
Polli, Marco
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2041
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Acq. date: 2025-12-11
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Views
2041
since deposited on 2021-10-22
2
last month
Acq. date: 2025-12-11
Citations