Browsing by author "Marzook, Taisir"
Now showing items 1-4 of 4
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Directed self-assembly process integration – fin patterning
Sayan, Safak; Chan, BT; Marzook, Taisir; Vandenbroeck, Nadia; Altamirano Sanchez, Efrain; Gronheid, Roel; Singh, Arjun; Rincon Delgadillo, Paulina (2015) -
Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterning
Chan, BT; Sayan, Safak; Marzook, Taisir; Altamirano Sanchez, Efrain; Gronheid, Roel; de Marneffe, Jean-Francois; Piumi, Daniele (2016) -
Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Doise, Jan; Bekaert, Joost; Chan, BT; Gronheid, Roel; Cao, Yi; Hong, Sung Eun; Lin, Guanyang; Fishman, Daniel; Chakk, Yuli; Marzook, Taisir (2015) -
Toward sub-20nm pitch Fin patterning and integration with DSA
Sayan, Safak; Marzook, Taisir; Chan, BT; Vandenbroeck, Nadia; Singh, Arjun; Laidler, David; Altamirano Sanchez, Efrain; Leray, Philippe; Rincon Delgadillo, Paulina; Gronheid, Roel; Vandenberghe, Geert; Clark, William; Juncker, Aurelie (2016)