Directed self-assembly process integration – fin patterning

Thumbnail
Metadata
Show full item record
Authors
Sayan, Safak; Chan, BT; Marzook, Taisir; Vandenbroeck, Nadia; Altamirano Sanchez, Efrain; Gronheid, Roel; Singh, Arjun; Rincon Delgadillo, Paulina
Conference
Advances in Patterning Materials and Processes XXXII
Title
Directed self-assembly process integration – fin patterning
Publication type
Proceedings paper
Collections