Publication:

Directed self-assembly process integration – fin patterning

Date

2015

Proceedings Paper

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Author(s)

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Marzook, Taisir

;

Vandenbroeck, Nadia

;

Altamirano Sanchez, Efrain

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Rincon Delgadillo, Paulina

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1947 since deposited on 2021-10-22

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Acq. date: 2026-09-16