Publication:

Directed self-assembly process integration – fin patterning

Date

2015
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSayan, Safak
dc.contributor.authorChan, BT
dc.contributor.authorMarzook, Taisir
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorGronheid, Roel
dc.contributor.authorSingh, Arjun
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecAltamirano Sanchez, Efrain::0000-0003-3235-6055
dc.date.accessioned2021-10-22T22:35:36Z
dc.date.available2021-10-22T22:35:36Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25867
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854371
dc.source.beginpage94250R
dc.source.conferenceAdvances in Patterning Materials and Processes XXXII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.title

Directed self-assembly process integration – fin patterning

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions