Browsing by author "Buttgereit, Ute"
Now showing items 1-3 of 3
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Effective use of aerial image metrology for calibration of OPC models
Chen, Ao; Foong, Yee Mei; Thaler, Thomas; Buttgereit, Ute; Chung, Angeline; Burbine, Andrew; Sturtevant, John; Clifford, Chris; Adam, Kostas; De Bisschop, Peter (2017) -
Phame: phase measurements on 45nm node phase shift features
Buttgereit, Ute; Birkner, Robert; Seidel, Dirk; Perlitz, Sacha; Philipsen, Vicky; De Bisschop, Peter (2008) -
Phase behavior through pitch and duty cycle and its impact on process window
Buttgereit, Ute; Birkner, Robert; Seidel, Dirk; Perlitz, Sacha; Philipsen, Vicky; De Bisschop, Peter (2009)