Browsing by author "Rubin, Leonard"

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Influence of the process sequence and termal budget on the strain of SiC stressor layers formed by ion implantation

Rosseel, Erik; Ortolland, Claude; Hikavyy, Andriy; Schram, Tom; Falepin, Annelies; Hoffmann, Thomas Y.; Douhard, Bastien; Moussa, Alain; Vandervorst, Wilfried; Ameen, Mike; Rubin, Leonard (2010)
Influence of the process sequence and termal budget on the straion fof SiC stressor layers formed by Ion Implantation

Rosseel, Erik; Ortolland, Claude; Hikavyy, Andriy; Schram, Tom; Falepin, Annelies; Hoffmann, Thomas Y.; Vandervorst, Wilfried; Ameen, Mike; Rubin, Leonard (2010-10)