Browsing by author "Watanabe, Hidehiro"
Now showing items 1-5 of 5
-
ABI tool performance confirmation by NXE3300 printing results for native EUV blank defects at 16nm half pitch
Jonckheere, Rik; Yamane, Takeshi; Takagi, Noriaki; Watanabe, Hidehiro; Beral, Christophe (2016-11) -
ABI tool performance confirmed by NXE3300 printing results
Jonckheere, Rik; Takagi, Noriaki; Watanabe, Hidehiro; Yamane, Takeshi; Van Den Heuvel, Dieter; Gallagher, Emily (2015-10) -
Correlation of actinic blank inspection and experimental phase defect printability study on NXE3x00 EUV scanner
Jonckheere, Rik; Van Den Heuvel, Dieter; Takagi, Noriaki; Watanabe, Hidehiro; Gallagher, Emily (2015) -
EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection
Takagi, Noriaki; Watanabe, Hidehiro; Van Den Heuvel, Dieter; Jonckheere, Rik; Gallagher, Emily (2015-07) -
EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection
Takagi, Noriaki; Watanabe, Hidehiro; Van Den Heuvel, Dieter; Jonckheere, Rik; Gallagher, Emily (2015)