Authors

Takagi, Noriaki; Watanabe, Hidehiro; Van Den Heuvel, Dieter; Jonckheere, Rik; Gallagher, Emily

Conference

Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII

Title

EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection

Publication type

Proceedings paper

Embargo date

9999-12-31