Browsing by author "Patz, Michael"
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Evaluation of gas cluster ion beam processing for sealing af a porous dielectric
Brongersma, Sywert; Sherman, S.; Tabat, M.; Patz, Michael; Beyer, Gerald; Travaly, Youssef; Le, Quoc Toan; Caluwaerts, Rudy; Hautala, J. (2005-01) -
Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance
Iacopi, Francesca; Patz, Michael; Vos, Ingrid; Tokei, Zsolt; Sijmus, Bram; Le, Quoc Toan; Sleeckx, Erik; Eyckens, Brenda; Struyf, Herbert; Das, Arabinda; Maex, Karen (2003) -
Understanding adhesion failure in low-k dielectric stacks during chemical mechanical polishing
Iacopi, Francesca; Degryse, Dominiek; Vos, Ingrid; Patz, Michael; Maex, Karen (2004-01)