Browsing by author "Engelen, Jan"
Now showing items 1-3 of 3
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Crack-free GaN Grown on Si(111) by MOVPE by introducing Step-Graded AlGaN Buffer Layers
Cheng, Kai; Leys, Maarten; Degroote, Stefan; Boeykens, Steven; Derluyn, Joff; Germain, Marianne; Engelen, Jan; Borghs, Gustaaf (2005) -
Evidence of speckle in extreme-UV lithography
Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Pei-Yang, Yan; Leeson, Michael; Younkin, Todd (2012-10) -
Mask effects on resist variability in extreme ultraviolet lithography
Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Yan, Pei-Yang; Leeson, Michael; Younkin, Todd; Garidis, Kostas; Biafore, John (2013)