Browsing by author "Jung, Sung-Hoon"

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New mechanisms for ozone-based ALD growth of high-k dielectrics via nitrogen-oxygen species

Jung, Sung-Hoon; Raisanen, Petri; Givens, Michael; Shero, Eric; Delabie, Annelies; Swerts, Johan; Van Elshocht, Sven; Maes, Jan Willem (2010)
Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species

Delabie, Annelies; Swerts, Johan; Van Elshocht, Sven; Jung, Sung-Hoon; Raisanen, Petri; Givens, Michael; Shero, Eric; Peeters, Jozef; Machkaoutsan, Vladimir; Maes, Jan (2011-03)