New mechanisms for ozone-based ALD growth of high-k dielectrics via nitrogen-oxygen species

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Authors
Jung, Sung-Hoon; Raisanen, Petri; Givens, Michael; Shero, Eric; Delabie, Annelies; Swerts, Johan; Van Elshocht, Sven; Maes, Jan Willem
Conference
Atomic Layer Deposition Applications 6
Title
New mechanisms for ozone-based ALD growth of high-k dielectrics via nitrogen-oxygen species
Publication type
Proceedings paper
Embargo date
9999-12-31
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