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New mechanisms for ozone-based ALD growth of high-k dielectrics via nitrogen-oxygen species
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1953 since deposited on 2021-10-18
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Acq. date: 2025-10-25
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Views
1953 since deposited on 2021-10-18
415item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations