Browsing by author "Hogg, S.M."
Now showing items 1-3 of 3
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Dose dependent phenomena arising from implantation of Er into Si
Hogg, S.M.; Pipeleers, B.; Vantomme, Andre; Bender, Hugo; Richard, Olivier; Swart, M. (2005) -
Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, St.; Hogg, S.M.; Herzog, H.-J.; Hackbarth, T.; Loo, Roger; Bauer, M. (2003) -
Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing
Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, S.; Hogg, S.M.; Herzog, H.J.; Hackbarth, T.; Loo, Roger; Bauer, R. (2003)