Browsing by author "Kayser, Sven"
Now showing items 1-8 of 8
-
A holistic approach of SIMS analysis for advanced semiconductor structures
Franquet, Alexis; Spampinato, Valentina; Pirkl, Alexander; Kayser, Sven; Moellers, Rudolf; Conard, Thierry; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Havelund, Rasmus; Gilmore, Ian; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures
Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Havelund, Rasmus; Gilmore, Ian; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with self-focusing SIM
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2019) -
Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2019) -
New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2020) -
Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.
Spampinato, Valentina; Franquet, Alexis; De Simone, Danilo; Pollentier, Ivan; Vandenbroeck, Nadia; Pirkl, Alexander; Kayser, Sven; Vandervorst, Wilfried; van der Heide, Paul (2019)