Browsing by author "Van den Berghe, Sven"
Now showing items 1-3 of 3
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Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices
Deng, Shaoren; Xie, Qi; Deduytsche, Davy; Schaekers, Marc; Lin, Dennis; Caymax, Matty; Delabie, Annelies; Van den Berghe, Sven; Qu, Xinping; Detavernier, Christophe (2011) -
TiO2/HfO2 bi-layer gate stacks grown by atomic layer deposition for germanium-based metal-oxide-semiconductor devices using GeOxNy passivation layer
Xie, Qi; Musschoot, Jan; Schaekers, Marc; Caymax, Matty; Delabie, Annelies; Lin, Dennis; Qu, Xin-Ping; Jiang, Yu-Long; Van den Berghe, Sven; Detavernier, Christophe (2011) -
Ultralow gate leakage current density of Ge metal-oxide-semiconductor capacitor passivated by in situ N2 plasma pretreatment
Deng, Shaoren; Xie, Qi; Schaekers, Marc; Lin, Dennis; Caymax, Matty; Delabie, Annelies; Van den Berghe, Sven; Qu, Xinping; Deduytsche, Davy; Detavernier, Christophe (2012)