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Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices
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Authors
Deng, Shaoren
;
Xie, Qi
;
Deduytsche, Davy
;
Schaekers, Marc
;
Lin, Dennis
;
Caymax, Matty
;
Delabie, Annelies
;
Van den Berghe, Sven
;
Qu, Xinping
;
Detavernier, Christophe
ISSN
0003-6951
Issue
5
Journal
Applied Physics Letters
Volume
90
Title
Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices
Publication type
Journal article
Embargo date
9999-12-31
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