Publication:

Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices

Date

2011
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorDeng, Shaoren
dc.contributor.authorXie, Qi
dc.contributor.authorDeduytsche, Davy
dc.contributor.authorSchaekers, Marc
dc.contributor.authorLin, Dennis
dc.contributor.authorCaymax, Matty
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan den Berghe, Sven
dc.contributor.authorQu, Xinping
dc.contributor.authorDetavernier, Christophe
dc.contributor.imecauthorDeng, Shaoren
dc.contributor.imecauthorXie, Qi
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-19T13:13:24Z
dc.date.available2021-10-19T13:13:24Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18828
dc.source.beginpage52906
dc.source.issue5
dc.source.journalApplied Physics Letters
dc.source.volume90
dc.title

Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
22774.pdf
Size:
398.32 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles