Authors

Deng, Shaoren; Xie, Qi; Schaekers, Marc; Lin, Dennis; Caymax, Matty; Delabie, Annelies; Van den Berghe, Sven; Qu, Xinping; Deduytsche, Davy; Detavernier, Christophe

Conference

Materials for Advanced Metallization - MAM

Title

Ultralow gate leakage current density of Ge metal-oxide-semiconductor capacitor passivated by in situ N2 plasma pretreatment

Publication type

Meeting abstract

Embargo date

9999-12-31