Browsing by author "Scheruebl, Thomas"
Now showing items 1-3 of 3
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AIMS TM 45 inspection of CH treated with inverse lithography
Hendrickx, Eric; Birkner, Robert; Kempsell, Monica; Tritchkov, Alexander; Richter, Rigo; Vandenberghe, Geert; Scheruebl, Thomas (2008) -
Application of pixel-based mask optimization technique for high-transmission attenuated PSM
Sakajiri, Kyohei; Tritchkov, Alexander; Granik, Yuri; Hendrickx, Eric; Vandenberghe, Geert; Kempsell, Monica; Fenger, Germain; Boehm, Klaus; Scheruebl, Thomas (2009) -
Test of vector effect emulation of the AIMSTM45-193i
De Bisschop, Peter; Philipsen, Vicky; Birkner, Robert; Richter, Rigo; Scheruebl, Thomas (2007)