Browsing by author "Karklin, Linard"

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Aerial image simulations of soft and phase defects in 193-nm lithography for 10-nm node

Driessen, Frank; Philipsen, Vicky; Jonckheere, Rik; Liu, Hua-Yu; Karklin, Linard (2002)
Performance optimization of the double-exposure alternating PSM for (sub-)100-nm ICs

Vandenberghe, Geert; Driessen, Frank; Van Adrichem, Paul; Ronse, Kurt; Li, Jason; Karklin, Linard (2002)