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Aerial image simulations of soft and phase defects in 193-nm lithography for 10-nm node
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1945 since deposited on 2021-10-14
1last month
Acq. date: 2026-08-31
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Statistics
Views
1945 since deposited on 2021-10-14
1last month
Acq. date: 2026-08-31
Citations