Browsing by author "Rodbell, K.P."

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Characteristics of low-k and ultralow-k PECVD deposited SiCOH films

Grill, A.; Patel, V.; Rodbell, K.P.; Huang, E.; Christiansen, S.; Baklanov, Mikhaïl (2002)
Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study

Grill, A.; Patel, V.; Rodbell, K.P.; Huang, E.; Baklanov, Mikhaïl; Moguilnikov, Konstantin; Toney, M.; Kim, H.C. (2003)