Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study

Metadata

Show full item record

Authors

Grill, A.; Patel, V.; Rodbell, K.P.; Huang, E.; Baklanov, Mikhaïl; Moguilnikov, Konstantin; Toney, M.; Kim, H.C.

Issue

5

Journal

Journal of Applied Physics

Volume

94

Title

Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study

Publication type

Journal article

Collections

Articles