Publication:
Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study
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2030 since deposited on 2021-10-15
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Acq. date: 2026-10-08
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Statistics
Views
2030 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-10-08
Citations