Publication:
Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: a comparative study
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2017 since deposited on 2021-10-15
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Acq. date: 2025-10-24
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Metrics
Views
2017 since deposited on 2021-10-15
449item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations