Browsing by author "Bazley, D."

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Optimization of polysilicon encapsulated local oxidation of silicon

Badenes, Gonçal; Rooyackers, Rita; Jones, S. K.; Bazley, D.; Beanland, R.; De Wolf, Ingrid; Deferm, Ludo (1998)
Optimization of polysilicon encapsulated LOCOS for 0.25 micron CMOS: correlation between cavity dimensions, mechanical stress, and gate oxide integrity

Badenes, Gonçal; Rooyackers, Rita; Jones, S. K.; Bazley, D.; Beanland, R.; De Wolf, Ingrid; Deferm, Ludo (1997)