Optimization of polysilicon encapsulated local oxidation of silicon

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Authors

Badenes, Gonçal; Rooyackers, Rita; Jones, S. K.; Bazley, D.; Beanland, R.; De Wolf, Ingrid; Deferm, Ludo

Issue

5

Journal

Journal of the Electrochemical Society

Volume

145

Title

Optimization of polysilicon encapsulated local oxidation of silicon

Publication type

Journal article

Embargo date

9999-12-31

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