Publication:

Optimization of polysilicon encapsulated local oxidation of silicon

Date

1998
Journal article
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dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorJones, S. K.
dc.contributor.authorBazley, D.
dc.contributor.authorBeanland, R.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDeferm, Ludo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDeferm, Ludo
dc.date.accessioned2021-09-30T11:25:18Z
dc.date.available2021-09-30T11:25:18Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2352
dc.source.beginpage1653
dc.source.endpage1659
dc.source.issue5
dc.source.journalJournal of the Electrochemical Society
dc.source.volume145
dc.title

Optimization of polysilicon encapsulated local oxidation of silicon

dc.typeJournal article
dspace.entity.typePublication
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