Authors

Badenes, Gonçal; Rooyackers, Rita; Jones, S. K.; Bazley, D.; Beanland, R.; De Wolf, Ingrid; Deferm, Ludo

Conference

ULSI Science and Technology 1997

Title

Optimization of polysilicon encapsulated LOCOS for 0.25 micron CMOS: correlation between cavity dimensions, mechanical stress, and gate oxide integrity

Publication type

Proceedings paper

Embargo date

9999-12-31