Browsing by author "Mouwen, Nils"
Now showing items 1-3 of 3
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Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions
Philipsen, Harold; Mouwen, Nils; Teck, Sander; Monnens, Wouter; Le, Quoc Toan; Holsteyns, Frank; Struyf, Herbert (2019) -
Wet-chemical etching of ruthenium for advanced interconnects
Philipsen, Harold; Mouwen, Nils; Teck, Sander; Monnens, Wouter; Le, Quoc Toan; Holsteyns, Frank; Struyf, Herbert (2019) -
Wet-chemical etching of ruthenium in acidic Ce4+ solution
Philipsen, Harold; Teck, Sander; Mouwen, Nils; Monnens, Wouter; Le, Quoc Toan (2018)