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Wet-chemical etching of ruthenium for advanced interconnects
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Authors
Philipsen, Harold
;
Mouwen, Nils
;
Teck, Sander
;
Monnens, Wouter
;
Le, Quoc Toan
;
Holsteyns, Frank
;
Struyf, Herbert
Conference
MRS 2019 Spring Conference
Title
Wet-chemical etching of ruthenium for advanced interconnects
Publication type
Meeting abstract
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