Publication:

Wet-chemical etching of ruthenium for advanced interconnects

Date

2019
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorMouwen, Nils
dc.contributor.authorTeck, Sander
dc.contributor.authorMonnens, Wouter
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorStruyf, Herbert
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.accessioned2021-10-27T16:01:02Z
dc.date.available2021-10-27T16:01:02Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33793
dc.source.conferenceMRS 2019 Spring Conference
dc.source.conferencedate22/04/2019
dc.source.conferencelocationPhoenix, AZ USA
dc.title

Wet-chemical etching of ruthenium for advanced interconnects

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions