Browsing by author "Vinckier, Chris"
Now showing items 21-40 of 81
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Determination of photoresist degradation products in O-3/DI processing
Vankerckhoven, H.; De Smedt, F.; Van Herp, B.; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2002) -
Determination of photoresist degradation products in O3/DI water processing
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Determination of th Pd content in Pd-doped SnO2 films
Laureyn, Wim; Delabie, Lieselot; Huyberechts, Guido; Maes, Guido; Roggen, Jean; Stevens, G.; Vinckier, Chris (2000) -
Effect of additives on the removal efficiency of photoresist by ozone/Di-water processes; experimental study
Vankerckhoven, H.; De Smedt, Frank; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2003) -
Efficient combination of surface and bulk passivation schemes of high-efficiency multicrystalline silicon solar cells
El Gamel, Hussam; Barnett, A. M.; Rohatgi, A.; Chen, Zhi Yong; Vinckier, Chris; Nijs, Johan; Mertens, Robert (1995) -
Foton geïnduceerd etsen van koper en vorming van koper nanodraden
Dictus, Dries; De Gendt, Stefan; Vinckier, Chris; Boullart, Werner; Vanhaelemeersch, Serge (2008) -
Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Fyen, Wim; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, J.; Kovacs, F. (2005) -
Grazing incidence X-ray fluorescence spectrometry for compositional analysis of nanometer-thin high-k dielectric HfO2 layers
Hellin, David; Delabie, Annelies; Puurunen, Riikka; Beaven, Peter; Conard, Thierry; Brijs, Bert; De Gendt, Stefan; Vinckier, Chris (2005-07) -
Growth of copper and copper compound nanowires
Dictus, Dries; Shamiryan, Denis; Paraschiv, Vasile; Boullart, Werner; De Gendt, Stefan; Baklanov, Mikhaïl; Vinckier, Chris; Vanhaelemeersch, Serge (2008) -
HfO2 atomic layer deposition using HfCl4/H2O: the first reaction cycle
Nyns, Laura; Delabie, Annelies; Caymax, Matty; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; De Gendt, Stefan (2008) -
HfO2 atomic layer deposition using HfCl4/H2O: the first reaction cycle
Nyns, Laura; Delabie, Annelies; Caymax, Matty; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; De Gendt, Stefan (2008) -
High efficiency polycrystalline silicon solar cells using hydrogen remote plasma passivation
El Gamel, Hussam; Vinckier, Chris; Caymax, Matty; Ghannam, Moustafa; Poortmans, Jef; De Schepper, Patrick; Nijs, Johan; Mertens, Robert (1994) -
Impact of metal etch residues on etch species density and uniformity
Dictus, Dries; Shamiryan, Denis; Paraschiv, Vasile; Boullart, Werner; De Gendt, Stefan; Vinckier, Chris (2010) -
Interaction between bulk and surface passivation mechanisms in thin-film solar cells on defected silicon substrates
Vermeulen, Tom; Poortmans, Jef; Said, Khalid; Evrard, Olivier; Laureys, Wim; Caymax, Matty; Nijs, Johan; Mertens, Robert; Vinckier, Chris (1996) -
Investigation of metallic contamination analysis using vapor phase decomposition – droplet collection – total reflection X-ray fluorescence (VPD-DC-TXRF) for Pt-group elements on silicon wafers
Hellin, David; Valckx, Nick; Rip, Jens; De Gendt, Stefan; Vinckier, Chris (2008) -
Linearity of TXRF: droplet residues versus spin-coated wafers
Hellin, David; Fyen, Wim; Rip, Jens; Delande, Tinne; De Gendt, Stefan; Vinckier, Chris (2005) -
Low-temperature passivation for SiGe-alloy solar cells
Said, Khalid; Poortmans, Jef; Libezny, Milan; Caymax, Matty; Nijs, Johan; Mertens, Robert; Vinckier, Chris; Vyncke, Dominique; Seifert, W.; Kittler, M.; Silier, I.; Gutjahr, A.; Konuma, M. (1997) -
Materials compatibility and organic build-up during ozone-based cleanings of semiconductor devices
De Smedt, Frank; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Measurement of nanoparticles on silicon wafer surface using haze signal by light scattering
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Holsteyns, Frank; Kraus, H.; Mertens, Paul; Vinckier, Chris; Kovacs, F. (2005) -
Mechanisms of particle removal during brush scrubber cleaning
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Mertens, Paul; Heyns, Marc; Vinckier, Chris (2003)