Publication:
HfO2 atomic layer deposition using HfCl4/H2O: the first reaction cycle
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1830 since deposited on 2021-10-17
5last month
1last week
Acq. date: 2026-02-25
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Statistics
Views
1830 since deposited on 2021-10-17
5last month
1last week
Acq. date: 2026-02-25
Citations