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HfO2 atomic layer deposition using HfCl4/H2O: the first reaction cycle
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1825 since deposited on 2021-10-17
2last month
Acq. date: 2025-12-15
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Metrics
Views
1825 since deposited on 2021-10-17
2last month
Acq. date: 2025-12-15
Citations