Browsing by author "Finders, Jo"
Now showing items 41-42 of 42
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Sub-0.25 micron lithography applying illumination pupil filtering (quadrupole) on a DUV step-and-repeat system
Finders, Jo; Mulders, A. M.; Krist, J.; Flagello, D.; Luehrmann, P.; Maenhoudt, Mireille; Marschner, Thomas; De Bisschop, Peter; Ronse, Kurt (1998) -
Sub-32nm half pitch imaging with high NA immersion exposure systems using Double Patterning techniques
Vleeming, Bert; Maenhoudt, Mireille; Quaedackers, John; van der Heijden, Eddy; de Haas, Paul; Uzunbajakau, Siarhei; Meessen, Jeroen; Dicker, Gerald; Finders, Jo; Dusa, Mircea; Jaenen, Patrick; Locorotondo, Sabrina (2007)