Publication:
Sub-32nm half pitch imaging with high NA immersion exposure systems using Double Patterning techniques
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1924 since deposited on 2021-10-16
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Acq. date: 2025-10-25
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Views
1924 since deposited on 2021-10-16
417item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations