Browsing by author "Depas, Michel"
Now showing items 41-47 of 47
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The IMEC Clean concept : an advanced wafer cleaning technology
Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Heyns, Marc; Depas, Michel; Philipossian, A.; Vatel, Oliver (1994) -
Thin gate dielectrics for deep subhalf micron ICs
Depas, Michel (1995) -
Ultra thin gate oxide technology and reliability
Heyns, Marc; Depas, Michel; Teerlinck, Ivo; Meuris, Marc; Mertens, Paul; Vanhellemont, Jan; Mouche, Laurent; Nigam, Tanya; Wilhelm, Rudi; Knotter, Martin; Wolke, K.; Crossley, A.; Sofield, C. J.; Gräf, D. (1996) -
Ultra-thin gate oxide breakdown
Depas, Michel; Heyns, Marc; Mertens, Paul (1996) -
Ultra-thin gate oxide yield and reliability
Depas, Michel; Vermeire, Bert; Mertens, Paul; Meuris, Marc; Heyns, Marc (1994) -
Ultra-thin gate oxides below 3 nm grown in a cluster tool
Depas, Michel; Nigam, Tanya; Kenis, Karine; Heyns, Marc; Sprey, Hessel; Wilhelm, Rudi (1996) -
Wear-out of ultra-thin gate oxides during high-field electron tunnelling
Depas, Michel; Vermeire, Bert; Mertens, Paul; Meuris, Marc; Heyns, Marc (1995)