Ultra thin gate oxide technology and reliability

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Authors
Heyns, Marc; Depas, Michel; Teerlinck, Ivo; Meuris, Marc; Mertens, Paul; Vanhellemont, Jan; Mouche, Laurent; Nigam, Tanya; Wilhelm, Rudi; Knotter, Martin; Wolke, K.; Crossley, A.; Sofield, C. J.; Gräf, D.
Conference
Proceedings 5th International Symposium on Semiconductor Manufacturing - ISSM
Title
Ultra thin gate oxide technology and reliability
Publication type
Proceedings paper
Embargo date
9999-12-31
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