Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Ultra thin gate oxide technology and reliability
Publication:
Ultra thin gate oxide technology and reliability
Date
1996
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
1235.pdf
209.44 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyns, Marc
;
Depas, Michel
;
Teerlinck, Ivo
;
Meuris, Marc
;
Mertens, Paul
;
Vanhellemont, Jan
;
Mouche, Laurent
;
Nigam, Tanya
;
Wilhelm, Rudi
;
Knotter, Martin
;
Wolke, K.
;
Crossley, A.
;
Sofield, C. J.
;
Gräf, D.
Journal
Abstract
Description
Metrics
Views
2011
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2011
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations