Browsing by author "Depas, Michel"
Now showing items 21-40 of 47
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Just-Clean- Enough technology for the 21st century
Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Depas, Michel; Rotondaro, Antonio; Vermeire, Bert; Vandervorst, Wilfried; Storm, Wolfgang; Polleunis, C.; Bertrand, P.; McGeary, M. J.; Lubbers, A.; Hatcher, Z. (1995) -
Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques
Vanhellemont, Jan; Kissinger, G.; Gräf, D.; Kenis, Karine; Depas, Michel; Mertens, Paul; Lambert, U.; Heyns, Marc; Claeys, C.; Richter, H.; Wagner, Patrick (1995) -
Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation
Vanhellemont, Jan; Kissinger, G.; Gräf, D.; Kenis, Karine; Depas, Michel; Mertens, Paul; Lambert, U.; Heyns, Marc; Claeys, Cor; Richter, H.; Wagner, P. (1996) -
Microroughness of clean silicon surfaces and gate oxide breakdown
Depas, Michel; Crossley, A.; Vermeire, Bert; Mertens, Paul; Sofield, C. J.; Heyns, Marc (1995) -
New insights in the impact of the breakdown mechanisms on the statistics of intrinsic and extrinsic breakdown in thin oxides
Groeseneken, Guido; Degraeve, Robin; Ogier, Jean-Luc; Bellens, Rudi; Roussel, Philippe; Depas, Michel; Maes, Herman (1996) -
New insights in the relation between electron trap generation and the statistical properties of oxide breakdown
Degraeve, Robin; Groeseneken, Guido; Bellens, Rudi; Ogier, Jean-Luc; Depas, Michel; Roussel, Philippe; Maes, Herman (1998) -
On the breakdown statistics and mechanisms in ultra-thin oxides and nitrided oxides
Groeseneken, Guido; Degraeve, Robin; De Blauwe, Jan; Roussel, Philippe; Depas, Michel; Maes, Herman (1997) -
On the impact of grown-in silicon oxide precipitate nuclei on silicon gate oxide integrity
Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, Patrick (1996) -
On the impact of grown-in substrate defects and iron contamination on gate oxide integrity
Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, Patrick (1996) -
On the nature of grown-in defects in silicon: dependence on pulling conditions and evolution during treatments
Vanhellemont, Jan; Kissinger, G.; Senkader, S.; Gräf, D.; Kenis, Karine; Depas, Michel; Lambert, U.; Wagner, Patrick (1996) -
Relation between trap creation and breakdown during tunnelling current stressing of sub 3nm gate oxide
Depas, Michel; Heyns, Marc (1997) -
Reliability of ultra-thin gate oxide below 3 nm in the direct tunneling regime
Depas, Michel; Degraeve, Robin; Nigam, Tanya; Groeseneken, Guido; Heyns, Marc (1997) -
Reliability of ultra-thin gate oxides below 3 nm in the direct tunneling regime
Depas, Michel; Degraeve, Robin; Nigam, Tanya; Groeseneken, Guido; Heyns, Marc (1996) -
Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results
Tonova, Diana; Depas, Michel; Libezny, Milan; Heyns, Marc; Vanhellemont, Jan (1995) -
Soft breakdown of ultra-thin gate oxide layers
Depas, Michel; Nigam, Tanya; Heyns, Marc (1996) -
Soft breakdown of ultra-thin gate oxide layers
Depas, Michel; Heyns, Marc; Mertens, Paul (1995) -
Statistical analysis of gate oxide integrity test
Mertens, Paul; Vermeire, Bert; Depas, Michel; Meuris, Marc; Heyns, Marc; Gräf, D. (1994) -
Studie van de Elektrische Eigenschappen van Si/SiO2 Strukturen met een Ultradunne Oxydelaag
Depas, Michel (1995-03) -
Sub 3 nm gate oxide growth and reliability
Depas, Michel; Heyns, Marc; Sprey, Hessel; Wilhelm, Rudi (1997) -
The IMEC clean : A new concept for particle and metal removal on Si surfaces
Meuris, Marc; Mertens, Paul; Opdebeeck, Ann; Schmidt, Harald; Depas, Michel; Vereecke, Guy; Heyns, Marc; Philipossian, A. (1995)