Authors

Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, Patrick

Conference

Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

On the impact of grown-in substrate defects and iron contamination on gate oxide integrity

Publication type

Proceedings paper

Embargo date

9999-12-31